Electron microscopy
 
Si- and N- Bond Dissociation Energies for Some SiNx Source Chemistries
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Table 4728. Silicon- and nitrogen-bond dissociation energies for some SiNx source chemistries.

Source precursor Bond dissociation energy (kJ/mole)
Nitrogen
 
  N2 (N-N) 946
  NH3 (N-H) 435
  H2NNH2 (N –N) 272
Silicon
 
  SiCl4 (Si-Cl) 460
  H3SiCl (Si-Cl) 456
  HSiCl3 (Si-H) 394
  SiH4 (Si-H) 384
  SiBr4 (Si-Br) 377
  Si2H6 (Si-H) 374
  Si2H6 (Si-Si) 321
  SiI4 (Si-I) 284

 

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