Electron microscopy
  
List of Notations for Machine Learning Application to Wafers
- Python Automation and Machine Learning for ICs -
- An Online Book -
Python Automation and Machine Learning for ICs                                                   http://www.globalsino.com/ICs/        


Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

=================================================================================

Table 4223. List of notations for machine learning application to wafers. [1]

Symbol Description Value Note
yi Status of chips on wafer bin map i Normal = 0; yi ∈ {0, 1}J
Defective = 1
xij Polar coordinates of a defective chip on wafer bin map i (φij , rij)T j ∈ Ad(i)
zij Polar coordinates of a chip on wafer bin map i (φij , rij)T j ∈ {1, . . . , J}
φij Angular coordinate φ ∈ (0, 360]  
rij Radial coordinate r > 0  
C Set of local clusters    
Cb Local cluster   b ∈ {1, . . .}
Ug Global cluster   g ∈ {1, . . . , G}
Ng Bivariate Gaussian distribution    
fg Probability density function (pdf) of Ng    
μg Estimated mean vector for Ng μg ∈ R2  
Σg Estimated covariance matrix for Ng Σg ∈ R2×2  
Ad(i) Index set for defective chips in wafer bin map i    

 

============================================

         
         
         
         
         
         
         
         
         
         
         
         
         
         
         
         
         
         

 

 

 

 

 



















































 

 

 

 

[1] Jea Hoon Lee, Il-Chul Moon and Rosy Oh, Similarity Search on Wafer Bin Map Through Nonparametric and Hierarchical Clustering, IEEE Transactions on Semiconductor Manufacturing, 34(4), DOI: 10.1109/TSM.2021.3102679, (2021).
=================================================================================