Electron microscopy
 
PythonML
OLS (Ordinary Least Squares) Regression Model
- Python Automation and Machine Learning for ICs -
- An Online Book: Python Automation and Machine Learning for ICs by Yougui Liao -
Python Automation and Machine Learning for ICs                                                           http://www.globalsino.com/ICs/        


Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

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OLS (Ordinary Least Squares) is a fundamental technique used in statistics for linear regression analysis. It aims to find the line (or hyperplane in higher dimensions) that best fits a set of data points by minimizing the sum of the squares of the residuals, which are the differences between observed values and the values predicted by the linear model. The process involves several key steps:

  • Model Specification: Defining the dependent and independent variables.
  • Parameter Estimation: Calculating the coefficients that minimize the sum of squared residuals.
  • Fit Assessment: Evaluating how well the model fits the data, often using metrics like R-squared.

OLS is particularly popular due to its simplicity and the interpretability of its results. It's widely used across different fields to understand and predict relationships between variables. However, it assumes that there is a linear relationship between the variables, the errors are normally distributed and homoscedastic, and there is no multicollinearity among predictors. In tools like Excel, OLS can be implemented using add-ons like XLSTAT, which provide a user-friendly interface for performing these regressions and interpreting their results.

An OLS regression model for factorial analysis is:     
    Assuming we have a dataset containing the fail rates of semiconductor wafers under 40 different test bins (data) as shown below. The dataset includes five columns, each representing one of five wafers, with the fail rates measured for each. The wafers were fabricated using different combinations of 10 possible conditions. Specifically, Wafer1 was fabricated under Conditions 1 and 2; Wafer2 under Conditions 1, 2, 3, 6, and 9; Wafer3 under Conditions 1, 8, 9, and 10; Wafer4 under Conditions 1, 2, 3, 5, and 7; and Wafer5 under Conditions 1, 4, 5, and 8. We want to perform a fail analysis to understand the relationships between these varying fabrication conditions and the observed fail rates across the different bins. This will involve identifying any patterns or correlations that may exist between the conditions and the fail rates, which could help in pinpointing specific conditions that lead to higher fail rates, thereby facilitating improvements in fabrication processes (Script 1):

                

Any example of input csv data is:

Output from the regression modeling is:    

The output from the modeling is the summary of an OLS (Ordinary Least Squares) regression model, with key components of this output:

  • Regression Results Components
    • Dep. Variable: The dependent variable, Wafer1, is the variable being predicted or explained in the model.
    • R-squared: This is 0.000, indicating that the model explains none of the variability of the response data around its mean. In practical terms, the predictors do not explain any variance in the fail rates for Wafer1.
    • Adj. R-squared: Similarly adjusted R-squared, which is also 0.000, indicates no improvement or penalty for the number of predictors used in the model.
    • F-statistic: Shows 'nan' (not a number), which typically indicates an issue such as perfect multicollinearity or other numerical problems in the data that prevent the model from being fit properly.
    • Prob (F-statistic): Also 'nan', indicating that the p-value for the F-statistic can't be computed, which further supports the issue with the model fit.
    • Log-Likelihood: This is a measure of the goodness of fit of the model. The value -163.41 is quite low, indicating poor model fit.
    • AIC (Akaike Information Criterion) and BIC (Bayesian Information Criterion): These are both measures used to compare different models. The lower the values, the better the model fit, relative to other models. Here, they just indicate the model fit in numerical terms without a comparison.
  • Coefficients Table
    This table includes the estimated coefficients for each predictor variable in the model, along with their standard errors, t-values, p-values, and confidence intervals.
    • coef: Coefficients represent the change in the dependent variable for a one-unit change in the predictor, all else being equal. Here, each coefficient suggests the impact of a condition on the fail rates.
    • std err: Standard error of the coefficient, indicating the level of uncertainty around the coefficient estimate.
    • t: This is the t-statistic, which is used to determine whether the coefficient is significantly different from zero. A large t-value (in absolute terms) typically indicates that the effect is significant.
    • P>|t|: P-value associated with the t-statistic. A low p-value (< 0.05) suggests that the effect of the predictor is statistically significant.
    • [0.025 0.975]: These are the 95% confidence intervals for the coefficients. If this interval does not include zero, the effect is considered statistically significant at the 5% level.
  • Diagnostic Tests
    • Omnibus, Prob(Omnibus), Jarque-Bera (JB), and Prob(JB) are tests for normality of the residuals. Deviation from normality can be a sign of model misspecification.
    • Skew: Measures the symmetry of the data about the mean. Near zero means the data are relatively symmetric.
    • Kurtosis: Measures the tails of the distribution. A value close to 3 (for a normal distribution) is ideal.
    • Durbin-Watson: Tests for autocorrelation in the residuals from a regression. Values from 1.5 to 2.5 generally indicate that there is no autocorrelation.
  • Interpretation
    The results suggest significant issues with the model:
    • The R-squared values are zero, indicating no explanatory power.
    • The F-statistic is undefined, which might suggest issues such as multicollinearity.
    • The coefficients seem to be statistically significant, but this might be misleading due to potential issues in model specification or data problems.

To proceed, it's important to revisit the data preparation step, ensure correct encoding of variables, and possibly explore alternative modeling approaches or adjustments to the current model setup.

To understand the impact of each condition on the fail rates from the regression results, we can look at a few key metrics from the outputs. The primary focus should be on the coefficients and their corresponding t-values, and p-values:

  • Coefficients
    • Coefficient: This value represents the expected change in the dependent variable (fail rate) for a one-unit change in the predictor variable (presence of a condition), holding all other predictors constant.
    • Std err: This is the standard error of the coefficient, indicating the average distance that the coefficient estimates fall from the actual value.
    • t-value: A higher absolute t-value indicates that the coefficient is significant. It measures the number of standard deviations that the coefficient is away from zero.
  • Interpretation Steps
    • Coefficient Significance: Check the p-value associated with each coefficient. A p-value less than 0.05 typically indicates that the coefficient is statistically significant.
    • Magnitude and Direction: The magnitude of the coefficient tells you how much impact the condition has per unit change. The sign tells you the direction of the impact (positive or negative).
    • Compare t-values: Higher absolute t-values suggest a stronger evidence against the null hypothesis (which would state that the condition has no effect). This helps in determining the rank of impacts.
  • Example Interpretation:
    • Look at the coefficients and their respective t-values and p-values.
    • Wafer1:
      • ConditionX: Coefficient = 28.0801, t = 24.375, p < 0.000.
      • Condition2: Coefficient = 28.0801, t = 24.375, p < 0.000.
  • Highest Impact:
    • Ranking the Impact: Conditions with higher absolute coefficient values and higher t-values are ranked higher in terms of impact.
    • From the outputs above, each wafer is influenced differently by different conditions, but without comparative t-values across conditions for each wafer, it’s difficult to establish a ranking. It appears, however, that all conditions listed in the results are significant.
  • Important Notes:
    • Multicollinearity Warning: The warnings about multicollinearity (high condition numbers and issues with the smallest eigenvalue) suggest that the conditions are highly correlated with each other. This can distort the impact estimates and make the coefficients unreliable. We might need to address this by possibly reducing the number of conditions included in the model simultaneously or using techniques like Principal Component Analysis (PCA) or regularization methods in regression.
    • Model Fit Issues: The F-statistics being 'nan' and R-squared values at 0 or negative might indicate issues with the model fit or data issues. It's important to investigate why the model is not fitting well—this might be due to data not meeting the assumptions of linear regression.

Another way, to analyze the impact of different fabrication conditions on the fail rates of the wafers, with OLS regression model is the analysis with correlation analysis and regression models (Script 2). This script does:

  • Correlation Analysis: To see if there is any linear relationship between the fail rates and the different wafers. It calculates and visualizes the correlation matrix for the fail rates of different wafers to see how they relate to each other.
  • Multiple Linear Regression: To determine the impact of the different conditions on the fail rates. Multiple Linear Regression: The script uses the conditions as independent variables and the mean fail rates of each wafer as the dependent variable to determine the impact of different fabrication conditions. This is done using the statsmodels library.
In this analysis, the input data is the same as the one above (data), but the output is: 

  OLS

OLS

OLS

The linear regression results, including the coefficients and their significance, help identify which conditions have a significant impact on the fail rates. The plots provide a visual comparison between actual and predicted fail rates. The OLS is a method for estimating the unknown parameters in a linear regression model, with the goal of minimizing the sum of the squares of the differences between the observed and predicted values.

In the OLS regression, the script does:

  • Preparing the Data:
    • The dataset containing the fail rates for different wafers is prepared.
    • A binary condition matrix is created to represent which fabrication conditions were used for each wafer.
  • Correlation Analysis:
    • The correlation matrix is calculated to see the relationships between the fail rates of different wafers.
    • A heatmap is plotted to visualize these correlations.
  • Multiple Linear Regression (OLS):
    • The mean fail rates for each wafer are calculated.
    • The binary condition matrix is used as the independent variables (X), and the mean fail rates are used as the dependent variable (y).
    • The statsmodels library is used to perform OLS regression.
    • The model's summary provides details about the coefficients, their significance, and other statistics.

Table 3277 lists the differences between the two scripts.

Table 3277. Differences between the two scripts.

  Script 1 Script 2
Used libraries import pandas as pd
import statsmodels.api as sm
import matplotlib.pyplot as plt 
import pandas as pd import numpy as np
import statsmodels.api as sm
import matplotlib.pyplot as plt
import seaborn as sns 
Overall Purpose and Approach  Focuses on analyzing fail rates for each wafer individually by performing regression analysis with specific conditions mapped to each wafer.  Performs a correlation analysis and then a regression analysis on the mean fail rates of wafers using a binary condition matrix.
Data Handling  Reads the data from a CSV file.
Encodes specific conditions for each wafer, filling missing values with 0. 
Reads the data from a CSV file.
Performs a correlation analysis and visualizes the correlation matrix using a heatmap.
Constructs a binary condition matrix manually for regression analysis. 
Regression Analysis  Separately processes each wafer, creating response variables and predictors specific to each wafer.
Fits an OLS regression model for each wafer.
Outputs the summary of the regression model for each wafer. 
Uses the mean fail rates of the wafers as the dependent variable.
Constructs a binary condition matrix and uses it as independent variables.
Fits an OLS regression model using the binary condition matrix.
Outputs the summary of the regression model and plots actual vs. predicted mean fail rates. 
Plotting  Plots a bar chart of fail rates across different bins for each wafer.  Plots the correlation matrix as a heatmap.
Plots actual vs. predicted mean fail rates for the wafers. 
Additional Features  Handles missing values in the encoded conditions by filling them with 0.  Performs correlation analysis on the entire dataset.
Manually constructs a binary condition matrix, which is not dynamically generated based on the data. 
Advantages  Focused Analysis: Separate Models for Each Wafer: By analyzing each wafer separately, the script allows for a more detailed understanding of how specific conditions affect each wafer's fail rates.
Realistic Modeling: Avoids Overfitting: By focusing on individual wafers and not aggregating data, the script avoids overfitting issues seen in aggregated models.  
Comprehensive Analysis: Aggregated Mean Fail Rates: By using mean fail rates and a single model, the script provides an overall view of how conditions affect fail rates across all wafers.
Correlation Analysis: Heatmap Visualization: The correlation matrix and its visualization help in understanding the relationships between different variables, providing insights before running the regression model.
Simplicity: Single Model: The use of a single regression model simplifies the analysis process and interpretation.
Disadvantages  Complexity: Multiple Models: Creating and interpreting separate models for each wafer can be complex and time-consuming.
Potential for Missed Insights: Lack of Aggregated Analysis: By not aggregating data, the script might miss overall trends that could be apparent in a more comprehensive analysis.
Data Requirements: Condition Encoding: The need to encode conditions for each wafer might be cumbersome and error-prone, especially with large datasets.  
Statistical Issues with Overfitting and Multicollinearity: The model suffers from overfitting and multicollinearity due to the small number of observations relative to the number of predictors, leading to unreliable statistics.
Misleading Results with High R-squared: The perfect fit indicated by the high R-squared value is misleading and does not reflect the true explanatory power of the model.
Loss of Detail with Mean Fail Rates: Aggregating fail rates into mean values for each wafer can obscure important details and variability within the data.  
Summary  Is more focused on individual wafer analysis with a detailed approach to regression using specific conditions mapped dynamically for each wafer. 
It is advantageous for detailed, wafer-specific analysis, avoiding overfitting and maintaining data integrity but is complex and might miss overall trends.
Takes a more generalized approach by analyzing the correlation matrix and using mean fail rates with a manually constructed binary condition matrix for regression.
It provides a comprehensive, simpler view and incorporates correlation analysis but suffers from significant statistical issues and loss of detail due to aggregation.
The results from the two scripts are not consistent due to the reasons below
Analysis Individual Wafer Analysis: Each wafer's fail rates are analyzed separately using specific conditions for that wafer. Each model includes only the conditions relevant to the wafer.  Aggregate Analysis: The mean fail rates of the wafers are used as the dependent variable, with a binary condition matrix as independent variables. 
Outcome The results show R-squared values of 0.000, indicating that the model explains none of the variability in the wafer fail rates. The F-statistics are "nan", which means the models are not statistically significant. This suggests that the conditions used do not have a significant impact on the fail rates for the individual wafers.  The model shows an R-squared value of 1.000, which suggests perfect fit. However, the F-statistic and p-values are "nan", and the standard errors are "inf" (infinite), indicating problems with the model, likely due to overfitting or multicollinearity. The high R-squared is misleading here and likely due to the very small number of observations (only 5 wafers). 
Model Structure Creates separate models for each wafer with conditions specifically mapped to each wafer. Uses a single model with all conditions as predictors and mean fail rates as the response.
Data Representation  Treats fail rates for each wafer independently across different bins Aggregates the fail rates into mean values for each wafer.
Statistical Issues  Script 1's results show no explanatory power (R-squared = 0.000) Script 2's results indicate a perfect but misleading fit (R-squared = 1.000) due to overfitting and likely multicollinearity.
Explanation for Differences  Model Interpretation: The separate models in Script 1 do not find significant relationships between the conditions and the fail rates for individual wafers, as indicated by the R-squared and F-statistics.  Overfitting and Multicollinearity: Script 2's approach suffers from overfitting due to the small number of observations (5 wafers) relative to the number of predictors (10 conditions), leading to unreliable statistics. 
Suggestions
Applicability It is the best applicable script Worse
Suggested Improvements  Automate Condition Encoding: To streamline the process, consider automating the condition encoding step. This can be achieved by dynamically generating condition columns based on the data.
Post-Analysis Aggregation: After performing the individual analyses, we can aggregate the results to identify common trends across wafers, providing a comprehensive view while retaining detailed insights. 
 

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